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FBAR Gas Sensors

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Piezoelectric Sensors

Part of the book series: Springer Series on Chemical Sensors and Biosensors ((SSSENSORS,volume 18))

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Abstract

Small-sized, high-sensitivity, and low-cost sensors are required for gas-sensing applications because of their critical role in environmental monitoring, clinic diagnosis, process control, and anti-terrorism. Given the rapid developments in micro-fabrication and microelectromechanical system (MEMS) technologies, film bulk acoustic resonator (FBAR) gas sensors have received increased research attention because of their improved working frequency and reliability. This chapter discusses the state-of-the-art and recent developments in FBAR gas sensors. The sensing mechanism and limitations of these sensors are summarized. Recent progress in the development of four major aspects of FBAR gas sensors, namely, FBAR gas sensors using different sensing materials, FBAR gas sensors used in electronic noses, system integration of FBAR gas sensors, and FBAR gas sensors used as micro-GC detectors, is reviewed. The potential future of FBAR sensors used in flexible electronics is also discussed.

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Authors and Affiliations

  1. State Key Laboratory of Precision Measuring Technology and Instruments, Tian** University, Tian**, China

    Zilun Wang, Xueyou Sun, Ye Chang, Xuexin Duan & Wei Pang

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  1. Zilun Wang
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  2. Xueyou Sun
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  3. Ye Chang
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  4. Xuexin Duan
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  5. Wei Pang
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Correspondence to Wei Pang .

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  1. Department of Physical Chemistry, University of Vienna, Vienna, Austria

    Peter Lieberzeit

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Wang, Z., Sun, X., Chang, Y., Duan, X., Pang, W. (2023). FBAR Gas Sensors. In: Lieberzeit, P. (eds) Piezoelectric Sensors. Springer Series on Chemical Sensors and Biosensors, vol 18. Springer, Cham. https://doi.org/10.1007/5346_2023_32

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