1 Introduction

Since the introduction of the micro-total analysis system (micro-TAS) by Manz in the early 1990s [1], microfluidic systems have been applied across diverse domains, including biomedical diagnosis, chemical synthesis and analysis, drug discovery, and human healthcare [2, 3]. The global impact of the coronavirus disease of 2019 (COVID-19) has underscored the urgent need for on-site diagnostic systems capable of swiftly and accurately analyzing minute clinical samples [4]. Microfluidic devices are viewed as a pivotal technology for meeting this demand. Microfluidic technology is recognized for its ability to precisely control reactions between proteins or DNAs in miniaturized volumes, and is thus considered indispensable for biomedical diagnosis [5,6,7]. However, the detection volume in microfluidic channels, typically at the micron or submicron level, is exceedingly small, as measured in nano- or pico-liters. Consequently, develo** highly sensitive detection techniques is imperative [8, 9]. In the early developmental stages of microfluidic technology, researchers relied extensively on on-chip optical detection methods such as UV/vis absorption, laser-induced fluorescence, chemiluminescence, and thermal lens microscopy [10,11,12]. Nevertheless, these approaches have limitations, including poor sensitivity to miniaturized detection volumes and constraints on multiplex detection capability.

Since 2005, a new on-chip detection method that utilizes the aggregation of Au or Ag nanoparticles for surface-enhanced Raman scattering (SERS) detection has emerged for addressing various challenges [13, 14]. This method leverages the localized surface plasmon coupling that occurs in nanogaps between nanoparticles, enabling highly sensitive detection of target molecules through electromagnetic enhancement phenomena [15,16,17,18]. In other words, SERS signal amplification can overcome the inherent low sensitivity of on-chip detection using fluorescence and UV/vis absorption. Additionally, SERS peaks have narrower linewidths than fluorescence or UV/vis absorption bands, providing an advantage for the simultaneous detection of multiple samples, a process known as multiplex detection [19, 20]. However, in SERS detection using lasers, the small focal volume may lead to limited reproducibility when measuring numerous detection spots due to the non-uniform distribution of hotspots [33,34,35]. Yan et al. developed a microfluidic system capable of detecting single molecules through two stages of photoinduced reduction (Fig. 1) [36]. Using a focused laser beam at the inlet of the microfluidic channel, they generated silver nanoparticles (AgNPs) through the first photo-induced reaction. Continuous scanning of the same laser beam over the residual reactants and AgNPs induced a second reduction reaction, effectively positioning the residual reactants in the nanogaps of the AgNP aggregates to form strong hotspots. During this process, the analyte is removed through photoreduction and photodegradation, virtually eliminating the memory effect caused by the residual reactants. By employing SERS-based microfluidic channels and laser-induced photoreactions, the authors successfully detected substances such as crystal violet, rhodamine 6G, methylene blue, hemoglobin, and 5-fluorouracil at concentrations as low as 10− 13 M.

Fig. 1
figure 1

Development of SERS materials and the progression of SERS intensity throughout the measurement sequence. a Diagram illustrating the microfluidic chip, featuring three modules designated for injection (red), mixing (green), and optical detection (blue). b Sequential steps in the growth of silver nano aggregates through photoinduction and subsequent in situ SERS measurements. Different colored solutions of AgNO3, H2O, crystal violet, and sodium citrate in the injection module are depicted, with the flow in the microchannel indicated by white arrows. c Collection of SERS spectra utilizing a 532 nm laser with a power of 130 µW. The integration time for each spectrum is 10 s. d Raman intensity histogram of CV at 1174 cm− 1 in the sequence of SERS measurements. Reprinted with permission from [36]. Copyright 2017 Wiley-VCH Verlag GmbH & Co

With the development of effective immunoassays for disease diagnosis in the mid-2000s, microfluidic chips have continued to be developed [37,38,39]. A notable example is the microfluidic biochip (MiChip) integrated with magnetic nano-chains created by ** results based on SERS intensity at 1004 cm− 1. k stacked image of SERS spectra of benzaldehyde at random regions. l Numerical electromagnetic field simulation in a single pit with bimetallic nanocubes using an excitation wavelength of 632.8 nm. m simulated gas flow field in the microchannel, with a color bar ranging from 0 to 40 mm/s. n Magnified top view of the channel near the entrance and exit of the premixer. o Streamlines near the micropits. p SERS spectra of benzaldehyde obtained on-chip and off-chip. Reprinted with permission from [46]. Copyright 2022 American Chemical Society