Measuring scanning acoustic microscope with a harmonic sounding signal

Abstract

A concept of a scanning acoustic microscope with a harmonic sounding signal for measuring the parameters of local homogeneous regions of flat samples is proposed. The distinctive feature of the device is the utilization of the Doppler effect that occurs in the sounding wave reflected from the sample surface when the sample is uniformly moved relative to the focusing ultrasonic transducer of the microscope. It is theoretically demonstrated that the spectrum of the received signal is determined by the product of the reflection coefficient and the transfer function of the transducer. The errors of the measurement technique are considered, and the sources of signal distortions are analyzed. High sensitivity of the measurement results to the errors of the scanning system is demonstrated. The developed measuring microscope is described, in which an acoustic interferometer is used to provide the necessary precision of the scanning coordinate measurement. The microscope transfer function is measured for the frequency of the sounding signal 65 MHz, and the values of density and bulk wave velocities are determined for a homogeneous sample by the measured phase of the reflection coefficient using the technique of nonlinear estimation of parameters. With fused quartz used as an example, it is shown that the measurement error is 7.2% for density and 2.3 and 0.7% for the velocities of longitudinal and transverse waves, respectively. In addition, the velocity of a leaky surface wave (SAW) is determined by two methods. One method is based on measuring the position of the inflexion point for the experimental phase of the reflection coefficient, and the other is based on calculating the SAW velocity corresponding to the measured values of density and bulk wave velocities. The errors of these methods are found to be equal to 0.42 and 0.17%, respectively.