Abstract
The magnetically levitated system, so called maglev system, has been researched and developed with the purpose of vacuum compatibility in the semiconductor industry. In the maglev system, the back electromotive force is inevitably generated when the system moves. The back electromotive force causes force/moment disturbances. Especially, the moment disturbances have negative effect on controlling the rotational motions (θ x , θ y , θ z ) whose control bandwidth is low. Therefore, the back electromotive force causes rotational motion errors. The rotational motion errors should be suppressed since they prevent high speed motion of the maglev system due to the rotational motion allowance of sensors. The rotational motion errors are suppressed by compensating the back electromotive force. In this paper, the back electromotive force, the cause of the rotational motion errors, is mathematically found in terms of the mover velocity and element of force-current matrix. A maglev system without the compensation was simulated and the rotational motion errors due to back electromotive force were found. Then, a feedforward compensated system using a mathematically modeled back electromotive force was simulated. It was verified that the feedforward compensation method with the modeled equation could be useful for suppressing rotational motion errors.
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Jae-heon Jeong received the B.S. degree in mechanical engineering from Hanyang University, Seoul, Korea in 2012. Since 2013, he has been in a combined master’s and doctorate program in mechanical engineering from Korea Advanced Institute of Science and Technology (KAIST), Daejeon, Korea. His current research interests include controls of high-precision stages such as magnetic levitation stages and dualservo stages.
Dahoon Ahn received the B.S. and Ph.D. degrees in mechanical engineering from the Korea Advanced Institute of Science and Technology, Daejeon, South Korea, in 2006 and 2013, respectively. He is currently a Senior Researcher at the High-Speed Railroad System Research Center, Korea Railroad Research Institute, Uiwang-si, South Korea. His research interests include design of precision motion mechanisms and electromagnetic actuators.
Kihyun Kim received B.S., M.S. and Ph.D. degrees in mechanical engineering from the Korea Advanced Institute of Science and Technology (KAIST), Daejeon, South Korea, in 1999, 2001 and 2006, respectively. Since 2015, he has been an Assistant Professor in the Department of Mechatronics Engineering, Korea Polytechnic Univerity. His current research interests include the design of a high performance mechatronics system.
Young-Man Choi received B.S., M.S. and Ph.D. degrees from the Department of Mechanical Engineering of the Korea Advanced Institute of Science and Technology (KAIST), Republic of Korea, in 2002, 2004 and 2008, respectively. He is an Assistant Professor at the Department of Mechanical Engineering of Ajou University, Suwon, Korea. From 2008 to 2011, he worked at the National Institute of Standards and Technology (NIST), United States, where he worked on a project on MEMS nano-positioning and metrology systems for NEMS/MEMS. From 2012 to 2016, he was a Senior Researcher at the Korea Institute of Machinery and Materials (KIMM), Daejeon, Korea, where he worked on precision machines and processes for printed flexible electronics. His research interests include high precision machines, roll-to-roll printing machines, and flexible electronics manufacturing.
MyeongHyeon Kim received B.S., M.S. and Ph.D. degrees in mechanical engineering from the Korea Advanced Institute of Science and Technology (KAIST), Daejeon, South Korea, in 2010, 2012 and 2016, respectively. He is currently a Senior Researcher at the Center for Mass and Related Quantities, Korea Research Institute of Standards and Science (KRISS), South Korea. His research interests include the design of high-precision systems, active vibration isolation systems, and design of watt balance mechanisms.
Hak-Jun Lee received the B.S and Ph.D. degrees from the Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology, Daejeon, Korea, in 2011 and 2017, respectively. He is currently a Senior Researcher at the Manufacturing Technology Center, Samsung Electronics Co., South Korea. His research interests include design, analysis and control of piezoelectric stages.
Jaehyun Park received the B.S. and Ph.D. degrees from the Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology, Daejeon, Korea, in 2011 and 2017, respectively. He is currently a Senior Researcher at the. Manufacturing Technology Center, Samsung Electronics Co., South Korea. His current research interests include the design and control of high-precision stage.
Hyunjun Kim received the B.S. and M.S. degrees in mechanical and aerospace engineering from Seoul National University, Seoul, South Korea in 2002 and 2004 and the Ph.D. degree in mechanical engineering from the Korea Advanced Institute of Science and Technology, Daejeon, South Korea in 2016. He is currently a Senior Researcher at the 5th institute, Agency for Defense Development (ADD), South Korea. His research interests include the design of multi-functional optical systems and the design of high precision mechatronics.
Jiheun Ryu received the B.S. and Ph.D. degrees in mechanical engineering from the Korea Advanced Institute of Science and Technology, Daejeon, South Korea, in 2012 and 2017, respectively. He is currently a Postdoctoral Researcher at the Machine Technology Research Institute of the Korea Advanced Institute of Science and Technology, South Korea. His research interests include the design of high-resolution optical systems, optomechanical devices, and design of high-precision mechatronics.
Hyo-young Kim received the B.S. degree in mechanical engineering from Hanyang University, Seoul, Korea in 2007. He received his M.S, Ph.D. degrees in mechanical engineering from the Korea Advanced Institute of Science and Technology (KAIST), Daejeon, Korea, in 2009 and 2013, respectively. He is currently a Senior Researcher in the Korea Institute of Industrial Technology (KITECH). His research interests include the design and control of high-precision stage system, active vibration isolation system, spherical motor, robot machining and reaction force compensation system.
Dae-Gab Gweon received the B.S. degree from Hanyang University, Seoul, Korea, the M.S. degree in mechanical engineering from Korea Advanced Institute of Science and Technology (KAIST), Daejeon, Korea, in 1977, and the Ph.D. degree from the University of Stuttgart, Stuttgart, Germany, in 1987. Since 1989, he has been a Professor in the Department of Mechanical Engineering, KAIST. His current research interests include the areas of nanopositioning systems and nanomeasurement systems.
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Jeong, Jh., Ahn, D., Kim, K. et al. Feedforward compensation of back electromotive force for suppressing rotational motion errors in a magnetically levitated system. J Mech Sci Technol 31, 4619–4630 (2017). https://doi.org/10.1007/s12206-017-0908-4
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DOI: https://doi.org/10.1007/s12206-017-0908-4