SpringerLink
Log in

Optical characterization of oxynitride films in the visible-ultraviolet range

  • Surfaces And Multilayers
  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

Oxynitride optical properties in the visible-ultraviolet spectral range are very interesting, due to their use in electronic device manufacturing. This paper presents spectra of refractive index and extinction coefficient of oxynitride films deposited on silicon with different composition, as derived from spectroscopic ellipsometry measurements on the basis of an effective medium approach. These data evidence the presence of a Si-rich layer on the oxynitride/silicon interface. Electronic polarizability and energy gap of all compounds were evaluated. Moreover, absolute reflectance of the samples was derived from optical functions and compared with the measured value.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Subscribe and save

Springer+ Basic
EUR 32.99 /Month
  • Get 10 units per month
  • Download Article/Chapter or Ebook
  • 1 Unit = 1 Article or 1 Chapter
  • Cancel anytime
Subscribe now

Buy Now

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. J. Marks, K. Law, D. Wane: Proc. 6th Int'l IEEE VLSI Multilevel Interconnection Conference (IEEE, New York 1989) p. 89

    Google Scholar 

  2. SOPRA-26, Rue Pierre Joigneaux, F-92270 Bois-Colombes, France

  3. W.H. Press, B.P. Flannery, S.A. Tukolsky, W.T. Vetterling: Numerical Recipes (Cambridge Univ. Press, Cambridge 1986) p. 521

    Google Scholar 

  4. J.A. Dobrowolski, F.C. Ho, A. Waldorf: Appl. Opt. 22, 3191 (1983)

    Google Scholar 

  5. V. Nayar, C. Pickering, A.M. Hodge: Thin Solid Films 195, 185 (1991)

    Google Scholar 

  6. D.A.G. Bruggeman: Ann. Phys. (Leipzig) 24, 636 (1935)

    Google Scholar 

  7. D.E. Aspnes: Thin Solid Films 89, 249 (1982)

    Google Scholar 

  8. H.R. Philipp: In Handbook of Optical Constants of Solids, ed. by E.D. Palik (Academic, Orlando 1985), p. 752; ibid., p. 772; D.F. Edwards: ibid., p. 552

    Google Scholar 

  9. Z. Yin, F.W. Smith: Phys. Rev. B 42, 3666 (1990)

    Google Scholar 

  10. J.B. Theeten, D.E. Aspnes: Thin Solid Films 60, 183 (1979)

    Google Scholar 

  11. J. De Laet, J. Vanhellemont, H. Terryn, J. Vereeken: Appl. Phys. A 54, 72 (1992)

    Google Scholar 

  12. N.M. Ravindra, J. Narayan: J. Appl. Phys. 61, 2017 (1987)

    Google Scholar 

  13. E.A. Davis, N.F. Mott: Phil. Mag. 22, 903 (1970)

    Google Scholar 

  14. J. Tauc: In Optical Properties of Solids, ed. by F. Abelès (North-Holland, Amsterdam 1971) p. 277

    Google Scholar 

  15. G.K.M. Thutupalli, S.G. Tomlin: J. Phys. C 10, 467 (1977)

    Google Scholar 

  16. F. Urbach: Phys. Rev. 92, 1324 (1953)

    Google Scholar 

  17. J. Tauc, L. Štourač, V. Vorlíček, M. Závětová: Proc. Int'l Semicond. Conf. Moscow (1968) p. 1251

  18. J. Tauc: Mat. Res. Bull. 5, 721 (1970)

    Google Scholar 

  19. J.D. Dow, D. Redfield: Phys. Rev. Lett. 26, 762 (1971)

    Google Scholar 

  20. D.L. Wood, J. Tauc: Phys. Rev. B 5, 3144 (1972)

    Google Scholar 

  21. J. Tauc, A. Menth, D.L. Wood: Phys. Rev. Lett. 25, 749 (1970)

    Google Scholar 

  22. C.H. Seager, J.A. Knapp: Appl. Phys. Lett. 45, 1060 (1984)

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Dipartimento di Fisica, Università degli Studi, Via Campi 213/A, I-41000, Modena, Italy

    A. Borghesi

  2. Dipartimento di Fisica “A. Volta”, Università degli Studi, Via A. Bassi 6, 1-27100, Pavia, Italy

    E. Bellandi, G. Guizzetti & A. Sassella

  3. SGS-Thomson Microelectronics, Via Olivetti 2, I-20041, Agrate B. (Mi), Italy

    S. Rojas & L. Zanotti

Authors
  1. A. Borghesi
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. E. Bellandi
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. G. Guizzetti
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. A. Sassella
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. S. Rojas
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. L. Zanotti
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Borghesi, A., Bellandi, E., Guizzetti, G. et al. Optical characterization of oxynitride films in the visible-ultraviolet range. Appl. Phys. A 56, 147–152 (1993). https://doi.org/10.1007/BF00517682

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00517682

PACS

Search

Navigation