Abstract
The photoluminescence spectra of epitaxial n+-Ge:P/Si(001) structures are studied. The structures are grown by hot-wire chemical vapor deposition and doped with phosphorus to the maximum electron concentration 1 × 1020 cm–3 from a source based on thermally decomposed GaP. The effects of the do** level and rapid thermal annealing of n+-Ge:P layers on the photoluminescence spectra are studied. It is demonstrated that the epitaxial n+-Ge:P/Si(001) layers grown by hot-wire chemical vapor deposition are promising for application as active regions of light-emitting optoelectronic devices operating in the near-infrared spectral region.
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Funding
The study was supported by the Russian Science Foundation, project no. 18-72-10061.
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Translated by E. Smorgonskaya
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Prokhorov, D.S., Shengurov, V.G., Denisov, S.A. et al. Enhanced Photoluminescence of Heavily Doped n-Ge/Si(001) Layers. Semiconductors 53, 1262–1265 (2019). https://doi.org/10.1134/S1063782619090161
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DOI: https://doi.org/10.1134/S1063782619090161