Abstract
The advancement in the applications of wearable and smart devices stimulated the investigation for flexible electronic sensor. However, the efficient operation of these sensors at low temperature is a big challenge due to the inactivation of material microstructure. To address this point, we prepared a piezoresistive pressure sensor based on a three-dimensional porous reduced graphene oxide film with microvoids, which endowed the film’s excellent mechanical property, and thus the sensor still kept enough sensitivity at 77 K. At room temperature, the sensitivity of the pressure sensor was 0.009 kPa−1 (0–10 kPa), and the response time and recovery time were 13 ms and 25 ms, respectively. In liquid nitrogen, the sensitivity of the pressure sensor was 0.05 kPa−1 (0–5 kPa), and the response time and recovery time are 16 ms and 22 ms, respectively. The sensor showed excellent performances in real-time monitor of breathing, finger bending, frowning, and other human physiological signals. In addition, the sensor is assembled into a 3-pixel array to provide a 3D pressure map** for various forces under different temperature.
Similar content being viewed by others
References
J. Meng, P. Pan, Z. Yang, J. Wei, Q. Wang, M. Gong, G. Zhang, J. Mater. Sci. 55(23), 10084 (2020). https://doi.org/10.1007/s10853-020-04707-2
M. Park, Y.J. Park, X. Chen, Y.K. Park, M.S. Kim, J.H. Ahn, Adv. Mater. 28(13), 2556 (2016). https://doi.org/10.1002/adma.201505124
X. Pang, Q. Zhang, Y. Shao, M. Liu, D. Zhang, Y. Zhao, Sensors (Basel). (2021). https://doi.org/10.3390/s21041130
B.W. An, S. Heo, S. Ji, F. Bien, J.U. Park, Nat. Commun. 9(1), 2458 (2018). https://doi.org/10.1038/s41467-018-04906-1
G. Ge, Y. Zhang, J. Shao, W. Wang, W. Si, W. Huang, X. Dong, Adv. Funct. Mater (2018). https://doi.org/10.1002/adfm.201802576
Z. Chen, Z. Wang, X. Li, Y. Lin, N. Luo, M. Long, N. Zhao, J.B. Xu, ACS Nano 11(5), 4507 (2017). https://doi.org/10.1021/acsnano.6b08027
Y. Yang, H. Pan, G. **e, Y. Jiang, C. Chen, Y. Su, Y. Wang, H. Tai, Sens. Actuators A: Phys. (2020). https://doi.org/10.1016/j.sna.2019.111789
B. Ji, Q. Zhou, B. Hu, J. Zhong, J. Zhou, B. Zhou, Adv. Mater. (2021). https://doi.org/10.1002/adma.202100859
S. Li, R. Li, T. Chen, X. **ao, IEEE Sens. J. 20(23), 14436 (2020). https://doi.org/10.1109/jsen.2020.3008474
N.A. Choudhry, A. Rasheed, S. Ahmad, L. Arnold, L. Wang, IEEE Sens. J. 20(18), 10485 (2020). https://doi.org/10.1109/jsen.2020.2994264
S. Li, R. Li, O.G. González, T. Chen, X. **ao, Compos. Sci. Technol. (2021). https://doi.org/10.1016/j.compscitech.2020.108617
H. Liu, G. Zhao, M. Wu, Z. Liu, D. **ang, C. Wu, Y. Cheng, H. Wang, Z.L. Wang, L. Li, Nano Energy (2019). https://doi.org/10.1016/j.nanoen.2019.104161
Z. Song, W. Li, Y. Bao, H. Kong, S. Gan, W. Wang, Z. Liu, Y. Ma, D. Han, L. Niu, ACS Appl. Nano Mater. 3(2), 1731 (2020). https://doi.org/10.1021/acsanm.9b02435
H. Kong, Z. Song, J. Xu, D. Qu, Y. Bao, W. Wang, Z. Wang, Y. Zhang, Y. Ma, D. Han, L. Niu, Adv. Mater. Technol. (2020). https://doi.org/10.1002/admt.202000677
S. Lee, S. Franklin, F.A. Hassani, T. Yokota, O.G. Nayeem, Y. Wang, R. Leib, G. Cheng, D.W. Franklin, T. Someya, Science 370(6519), 966 (2020). https://doi.org/10.1126/science.abc9735
X. Pang, Q. Zhang, Y.W. Shao, M.J. Liu, D.L. Zhang, Y.L. Zhao, Sensors 21(4), 16 (2021). https://doi.org/10.3390/s21041130
G. Ge, Y.Z. Zhang, J.J. Shao, W.J. Wang, W.L. Si, W. Huang, X.C. Dong, Adv. Funct. Mater. 28(32), 8 (2018). https://doi.org/10.1002/adfm.201802576
F. Guo, Y.Q. Jiang, Z. Xu, Y.H. **ao, B. Fang, Y.J. Liu, W.W. Gao, P. Zhao, H.T. Wang, C. Gao, Nat. Commun. 9, 9 (2018). https://doi.org/10.1038/s41467-018-03268-y
C. Li, X.B. Deng, X.H. Zhou, Polymers 12(11), 15 (2020). https://doi.org/10.3390/polym12112670
D.H. Ho, Q. Sun, S.Y. Kim, J.T. Han, D.H. Kim, J.H. Cho, Adv. Mater. 28(13), 2601 (2016). https://doi.org/10.1002/adma.201505739
H. Cho, H. Lee, S. Lee, S. Kim, Ceram. Int. 47(12), 17702 (2021). https://doi.org/10.1016/j.ceramint.2021.03.090
Y. Pang, H. Tian, L.Q. Tao, Y.X. Li, X.F. Wang, N.Q. Deng, Y. Yang, T.L. Ren, ACS Appl. Mater. Interfaces 8(40), 26458 (2016). https://doi.org/10.1021/acsami.6b08172
L.Q. Tao, K.N. Zhang, H. Tian, Y. Liu, D.Y. Wang, Y.Q. Chen, Y. Yang, T.L. Ren, ACS Nano 11(9), 8790 (2017). https://doi.org/10.1021/acsnano.7b02826
L.W. Zhao, B. Jiang, Y.D. Huang, J. Mater. Sci. 54(7), 5472 (2019). https://doi.org/10.1007/s10853-018-03233-6
T. Wang, J.H. Li, Y. Zhang, F. Liu, B. Zhang, Y. Wang, R. Jiang, G.P. Zhang, R. Sun, C.P. Wong, Chem. Eur. J. 25(25), 6378 (2019). https://doi.org/10.1002/chem.201900014
Y.J. Lu, M.W. Tian, X.T. Sun, N. Pan, F.X. Chen, S.F. Zhu, X.S. Zhang, S.J. Chen, Compos. Part A Appl. Sci. Manuf. 117, 202 (2019). https://doi.org/10.1016/j.compositesa.2018.11.023
Q.C. Li, Y.M. Liu, D. Chen, J.M. Miao, S.J. Lin, D.X. Cui, IEEE Electron Device Lett. 42(4), 589 (2021). https://doi.org/10.1109/led.2021.3063166
M.H. Cao, J. Su, S.Q. Fan, H.W. Qiu, D.L. Su, L. Li, Chem. Eng. J. (2021). https://doi.org/10.1016/j.cej.2020.126777
L.F. Duan, L.J. Zhao, H. Cong, X.Y. Zhang, W. Lu, C.L. Xue, Small 15(7), 8 (2019). https://doi.org/10.1002/smll.201804347
X.Y. Zhang, S.H. Sun, X.J. Sun, Y.R. Zhao, L. Chen, Y. Yang, W. Lu, D.B. Li, Light-Sci. Appl. 5, 7 (2016). https://doi.org/10.1038/lsa.2016.130
R. Huang, M. Huang, X. Li, F. An, N. Koratkar, Z.Z. Yu, Adv. Mater. 30(21), e1707025 (2018). https://doi.org/10.1002/adma.201707025
X.L. Hou, Q. Zhang, L.Y. Wang, G.H. Gao, W. Lu, ACS Appl. Mater. Interfaces 13(10), 12432 (2021). https://doi.org/10.1021/acsami.0c18741
Z. **g, Q. Zhang, Y. Cheng, C. Ji, D. Zhao, Y. Liu, W. Jia, S. Pan, S. Sang, J. Micromech. Microeng. (2020). https://doi.org/10.1088/1361-6439/ab948f
A. Tewari, S. Gandla, S. Bohm, C.R. McNeill, D. Gupta, ACS Appl. Mater. Interfaces 10(6), 5185 (2018). https://doi.org/10.1021/acsami.7b15252
L. Zhang, H. Li, X. Lai, T. Gao, J. Yang, X. Zeng, ACS Appl. Mater. Interfaces 10(48), 41784 (2018). https://doi.org/10.1021/acsami.8b16027
A.F. Carvalho, A.J.S. Fernandes, R. Martins, E. Fortunato, F.M. Costa, Adv. Mater. Technol. (2020). https://doi.org/10.1002/admt.202000630
M. Cao, M. Wang, L. Li, H. Qiu, M.A. Padhiar, Z. Yang, Nano Energy 50, 528 (2018). https://doi.org/10.1016/j.nanoen.2018.05.038
X. Dong, Y. Wei, S. Chen, Y. Lin, L. Liu, J. Li, Compos. Sci. Technol. 155, 108 (2018). https://doi.org/10.1016/j.compscitech.2017.11.028
X. Lü, T. Yu, F. Meng, W. Bao, Adv. Mater. Technol. (2021). https://doi.org/10.1002/admt.202100248
Acknowledgements
This work was supported by National Natural Science Foundation of China (Grant Nos. 62004014 and 62004015), Science and Technology Research Project of Jilin Provincial Department of Education (JJKH20210735KJ).
Author information
Authors and Affiliations
Corresponding author
Ethics declarations
Conflict of interest
There is no conflict of interest among the authors.
Additional information
Publisher's Note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Rights and permissions
About this article
Cite this article
Jia, J., Yang, Y., Cai, B. et al. A 3D honeycomb graphene structure for wearable piezoresistive pressure sensor with high sensitivity. J Mater Sci: Mater Electron 33, 2003–2011 (2022). https://doi.org/10.1007/s10854-021-07403-2
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s10854-021-07403-2