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    A novel approach for MEMS with galvanic protection on SOI wafer

    A novel SOI-MEMS process with galvanic protection technique is presented in this paper. After front-end-of-line processes and metallization with Au on SOI wafers, the moving structures and release trenches are...

    Wenshan Wei, Weilong You, Wei Zhao, Zhengyin Yu, Jun Pang… in Microsystem Technologies (2015)