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    Chapter and Conference Paper

    A 3-DOF Rotational Precision Positioning Stage using Spring-mounted PZT Actuators

    A three degree-of-freedom (3-DOF) precision positioning stage with a half-sphere shape is proposed for the applications such as fiber alignment and optical mirror adjustment. An experimental setup consisting o...

    Yung-Tien Liu, Guo-You Lee in Towards Synthesis of Micro-/Nano-systems (2007)

  2. No Access

    Article

    System integration for on-machine measurement using a capacitive LVDT-like contact sensor

    In this study, an air-bearing capacitive linear variable differential transformer (LVDT)-like contact sensor with a rounded diamond tip was mounted to a desktop machine tool to construct an on-machine (OM) mea...

    Yung-Tien Liu, You-Liang Kuo, Da-Wei Yan in Advances in Manufacturing (2017)

  3. No Access

    Chapter and Conference Paper

    Numerical Study of a Piezoelectric XY-Stage with Diamond-Type Displacement Amplification Mechanism

    XY-stage having two-degree-of-freedom of motion ability is an important device in precision industry. Compared with traditional stack-type XY-stage, the piezoelectric XY-stage features compact size, smooth mot...

    Po-Yao Lin, Chen-Han Ke, Di-Yao Wang… in Advances in Mechanism and Machine Science (2023)

  4. No Access

    Article

    Recent Development of Piezoelectric Fast Tool Servo (FTS) for Precision Machining

    With an increasing demand of photoelectric components, the micro/ultraprecision machining technology has become more and more important. However, for some particular applications such as micro lens array for l...

    Yung-Tien Liu in International Journal of Precision Engineering and Manufacturing (2024)