Abstract
XY-stage having two-degree-of-freedom of motion ability is an important device in precision industry. Compared with traditional stack-type XY-stage, the piezoelectric XY-stage features compact size, smooth motion, and ultraprecision actuating ability. However, the main drawback of the piezoelectric actuator is its limited small displacement. In this study, the diamond-type displacement amplification mechanism (DDAM) is proposed to construct an XY-stage. The DDAM features higher stiffness than usual lever-type displacement amplification mechanism (LDAM). Through numerical simulation using FEM (finite-element method), a precision piezoelectric XY-stage is designed with the displacement amplification ratios of 2.05 and 1.93, displacements of 31.33 and 29.54 μm, and stiffness of 27.1 and 28.8 N/μm along the X- and Y-axis, respectively. Future works are to perform experimental examinations and practical application based on an implemented XY-stage positioning system.
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Acknowledgements
Financial support from the National Science and Technology Council of the Republic of China (Taiwan) with grant No. 112-2813-C-992-090-H is acknowledged.
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Lin, PY., Ke, CH., Wang, DY., Lin, SY., Liu, YT. (2023). Numerical Study of a Piezoelectric XY-Stage with Diamond-Type Displacement Amplification Mechanism. In: Okada, M. (eds) Advances in Mechanism and Machine Science. IFToMM WC 2023. Mechanisms and Machine Science, vol 148. Springer, Cham. https://doi.org/10.1007/978-3-031-45770-8_17
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DOI: https://doi.org/10.1007/978-3-031-45770-8_17
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