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Chapter and Conference Paper
Numerical Study of a Piezoelectric XY-Stage with Diamond-Type Displacement Amplification Mechanism
XY-stage having two-degree-of-freedom of motion ability is an important device in precision industry. Compared with traditional stack-type XY-stage, the piezoelectric XY-stage features compact size, smooth mot...
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Article
System integration for on-machine measurement using a capacitive LVDT-like contact sensor
In this study, an air-bearing capacitive linear variable differential transformer (LVDT)-like contact sensor with a rounded diamond tip was mounted to a desktop machine tool to construct an on-machine (OM) mea...