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  1. No Access

    Article

    Lab-on-a-chip: a component view

    Miniaturization is being increasingly applied to biological and chemical analysis processes. Lab-on-a-chip systems are direct creation of the advancement in the miniaturization of these processes. They offer a...

    Y. C. Lim, A. Z. Kouzani, W. Duan in Microsystem Technologies (2010)

  2. No Access

    Article

    Determination of layer-thickness fluctuations in Mo/Si multilayers by cross-sectional HR-TEM and X-ray diffraction

    We present a method of deriving single layer thickness fluctuations of Mo/Si EUV multilayers from cross-sectional high-resolution transmission electron microscopy micrographs. The obtained thickness values for...

    A. Aschentrup, W. Hachmann, T. Westerwalbesloh, Y.C. Lim… in Applied Physics A (2003)

  3. No Access

    Article

    Fabrication and characterization of EUV multilayer mirrors optimized for small spectral reflection bandwidth

    Our aim was to produce EUV multilayer mirrors with a small spectral bandwidth ΔE≤3 eV at 70 eV peak energy using UHV electron beam evaporation by varying the thickness ratio (Γ= ...

    Y.C. Lim, T. Westerwalbesloh, A. Aschentrup, O. Wehmeyer, G. Haindl… in Applied Physics A (2001)