Skip to main content

5 Result(s)

within Y. Sarov Remove this filter

and

  1. No Access

    Article

    Compact Modelling of Electrical, Mechanical and Thermal Behaviour for MEMS with SPICE

    In this paper we present a novel method of nonlinear macro model of a cantilever for mixed domain simulation only with SPICE. Based on lumped elements of equivalent circuits a model is developed, which realize...

    Andreas Frank, J.-P. Zoellner, Y. Sarov, Tz Ivanov… in MRS Online Proceedings Library (2011)

  2. No Access

    Article

    Thermally driven multi-layer actuator for 2D cantilever arrays

    The present work reports on novel four-layer thermally driven piezoresistive cantilevers implemented in one- and two-dimensional arrays for parallel proximity scanning. There, the heater (metallic meander), th...

    Y. Sarov, T. Ivanov, A. Frank, I. W. Rangelow in Applied Physics A (2011)

  3. No Access

    Article

    Controllable off-plane deflection of cantilevers for multiple scanning proximity probe arrays

    The presented work reports the fabrication of 4×32 arrays of fully addressable proximity probes, which are initially and controllably off-plane deflected (bent). Such a deflection is required for the simultane...

    Y. Sarov, T. Ivanov, A. Frank, I. W. Rangelow in Applied Physics A (2008)

  4. No Access

    Article

    Towards the implanting of ions and positioning of nanoparticles with nm spatial resolution

    Decreasing structure sizes in both conventional and quantum solid state devices require novel fabrication methods: we present a technology which allows to implant ions through a small hole in the tip of an ato...

    J. Meijer, S. Pezzagna, T. Vogel, B. Burchard, H.H. Bukow… in Applied Physics A (2008)

  5. No Access

    Article

    Diffraction under total internal reflection for micro-fluidic analysis

    This work presents the principles of a novel micro-optical system for micro- and nano-fluidic analysis. It is based on diffraction, occurring in total internal reflection conditions. The developed detector is ...

    Y. Sarov, T. Ivanov, K. Ivanova, V. Sarova, I. Capek, I.W. Rangelow in Applied Physics A (2006)