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  1. No Access

    Article

    Formation and Characteristics of CoSi2 Layers Synthesized by Mevva Implantation

    Ion beam synthesis of CoSi2 layers in Si by NIEVVA (Metal Vapor Vacuum Arc) implantation has been performed under various conditions. The formation and characteristics of these CoSi2 layers have been studied by X...

    S. P. Wong, Qicai Peng, W. Y. Cheung, W. S. Guo, J. B. Xu… in MRS Online Proceedings Library (1996)

  2. No Access

    Article

    Stress Distribution in Si Under Patterned thin Film Structures

    We have employed the infrared photoelasticity (PE) method to study the stress distribution in Si substrates under patterned thin film structures such as thermal oxide layers partially covered by metal films an...

    S. P. Wong, L. Huang, W. S. Guo, W. Y. Cheung… in MRS Online Proceedings Library (1996)

  3. No Access

    Article

    Ion Beam Synthesis of SiC/Si Heterostructures by MEVVA Implantation

    Ion beam synthesis of SiC/Si heterostructures was performed by MIEVVA (metal vapor vacuum arc) implantation under various implantation and annealing conditions. The implanted SiC/Si heterostructures were chara...

    S. P. Wong, L. C. Ho, Djhu Cihen, W. S. Guo, H. Yan… in MRS Online Proceedings Library (1996)

  4. No Access

    Article

    Formation and Characteristics of CoSi2 Layers Synthesized by Mevva Implantation

    Ion beam synthesis of CoSi2 layers in Si by MEVVA (Metal Vapor Vacuum Arc) implantation has been performed under various conditions. The formation and characteristics of these CoSi2 layers have been studied by XT...

    S. P. Wong, Qicai Peng, W. Y. Cheung, W. S. Guo, J. B. Xu… in MRS Online Proceedings Library (1996)

  5. No Access

    Article

    Ion Beam Synthesis of SiC/Si Heterostructures by Mevva Implantation

    Ion beam synthesis of SiC/Si heterostructures was performed by MEVVA (metal vapor vacuum arc) implantation under various implantation and annealing conditions. The implanted SiC/Si heterostructures were charac...

    S. P. Wong, L. C. Ho, Dihu Chen, W. S. Guo, H. Yan… in MRS Online Proceedings Library (1996)