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    Non-contact Electrical Measurements of Sheet Resistance and Leakage Current Density for Ultra-shallow (and other) Junctions

    A novel, non-contact method for determination of ultra-shallow junction sheet resistance and leakage current density has been developed based on monitoring the dynamics of photo-generated carriers by means of ...

    Vladimir N. Faifer, Michael I. Current, Wojtek Walecki… in MRS Online Proceedings Library (2003)