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Article
Ablation morphology and defect analysis of Ti thin film irradiated by femto- and picosecond laser for fine ablation of Micro-LED display thin film transistor repair
The titanium (Ti) thin film is a material used in the thin-film transistor (TFT) of Micro-LED display and require partial processing during repair processes. For a suitable repair process, defects such as part...
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Article
257 nm Deep UV Femtosecond Laser Ablation with Minimized Crack and Chip** on Display Ultra-Thin Glass
Glass is widely used for various applications, including flat panel displays, solar panels, architectural windows, and exterior materials. These applications exhibit increasing complexity and improved function...
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Article
Ablation morphology and characteristic analysis of anisotropic conductive film (ACF) using femtosecond lasers with NIR, Green, and DUV wavelengths for micro-LED display repair
Anisotropic conductive film (ACF) is an electrical and electronic material composed of conductive balls embedded in a polymer matrix. ACF plays a crucial role in connecting electrodes and chips in Micro-LEDs. ...
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Article
A Study of Ultrafast Ablation on ITO Thin Films with Wavelengths of 513 and 1026 nm for High Resolution Patterning
Indium tin oxide (ITO) exhibits transparency and high electrical conductivity in the visible and near-IR wavelength ranges. Therefore, ITO is used in liquid crystal displays, organic light-emitting diodes, pho...
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Article
Fine ablation with depth control of 25-nm resolution and morphologies irradiated by femtosecond laser pulses via beam sha**
Recently, the need for enhanced cutting tools to fabricate next-generation multilayer ceramic capacitors (MLCCs) and batteries has been identified. This is because existing cutting tools cause problems such as...
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Article
Morphologies of Cemented Tungsten Carbides Irradiated by Femtosecond Laser with High Pulse Energy for Machining Enhanced Cutting Tools
Recently, ultrafast laser machining has been used to machine hard materials. Ultrafast laser machining can be precisely machined without a non-thermal effect or damage to machining tools. However, their morpho...
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Article
Morphologies of cemented tungsten carbide ablated by pulsed femtosecond laser to manufacture next-generation blades of a cutting tool
Enhanced cutting tool blades are required to manufacture next-generation small multilayer ceramic capacitors. Cemented tungsten carbide is used as the material for these blades. Recently, laser ablation has be...
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Article
Enhancement periodic regularity of surface nano ripple structures on Si wafer using a square shaped flat-top beam femtosecond NIR laser
We report a new enhanced periodic regularity of surface nano ripple structures on a Si wafer using a square shaped flat-top beam femtosecond (190 fs) laser ( ...
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Article
Morphologies of femtosecond laser ablation of ITO thin films using gaussian or quasi-flat top beams for OLED repair
This study compares the ablation morphologies obtained with a femtosecond laser of both Gaussian and quasi-flat top beam profiles when applied to indium tin oxide (ITO) thin films for the purpose of OLED repai...
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Article
Selective lift-off of GaN light-emitting diode from a sapphire substrate using 266-nm diode-pumped solid-state laser irradiation
Selective laser lift-off of GaN from a sapphire substrate was demonstrated using 266-nm diode-pumped solid-state laser irradiation. To fabricate a single GaN light-emitting diode (LED) with a size of 100 μm × ...
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Article
Micro-cutting with diamond tool micro-patterned by femtosecond laser
The demand for micro-scale surface machining has been steadily increasing, and various methods have been introduced. Among these, microcutting with a diamond tool removes material by making multiple cutting pa...
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Article
Removal of nanoparticles on silicon wafer using a self-channeled plasma filament
The effective removal of nanoparticles from a silicon wafer surface was demonstrated using the self-channeled plasma filament excited by a femtosecond (130 fs) Ti:sapphire laser (λ p=790 nm). The ...
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Article
Surface pattern formation on Cr thin film with ultrafast laser pulse
Laser irradiation of a metal surface with multiple pulses just below the ablation threshold generates a periodic surface pattern known as the laser-induced periodic surface structure. The aim of this study is ...