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Article
Ablation morphology and defect analysis of Ti thin film irradiated by femto- and picosecond laser for fine ablation of Micro-LED display thin film transistor repair
The titanium (Ti) thin film is a material used in the thin-film transistor (TFT) of Micro-LED display and require partial processing during repair processes. For a suitable repair process, defects such as part...
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Article
Ablation morphology and characteristic analysis of anisotropic conductive film (ACF) using femtosecond lasers with NIR, Green, and DUV wavelengths for micro-LED display repair
Anisotropic conductive film (ACF) is an electrical and electronic material composed of conductive balls embedded in a polymer matrix. ACF plays a crucial role in connecting electrodes and chips in Micro-LEDs. ...
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Article
Fine ablation with depth control of 25-nm resolution and morphologies irradiated by femtosecond laser pulses via beam sha**
Recently, the need for enhanced cutting tools to fabricate next-generation multilayer ceramic capacitors (MLCCs) and batteries has been identified. This is because existing cutting tools cause problems such as...
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Article
Morphologies of cemented tungsten carbide ablated by pulsed femtosecond laser to manufacture next-generation blades of a cutting tool
Enhanced cutting tool blades are required to manufacture next-generation small multilayer ceramic capacitors. Cemented tungsten carbide is used as the material for these blades. Recently, laser ablation has be...
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Article
Enhancement periodic regularity of surface nano ripple structures on Si wafer using a square shaped flat-top beam femtosecond NIR laser
We report a new enhanced periodic regularity of surface nano ripple structures on a Si wafer using a square shaped flat-top beam femtosecond (190 fs) laser ( ...
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Article
Morphologies of femtosecond laser ablation of ITO thin films using gaussian or quasi-flat top beams for OLED repair
This study compares the ablation morphologies obtained with a femtosecond laser of both Gaussian and quasi-flat top beam profiles when applied to indium tin oxide (ITO) thin films for the purpose of OLED repai...
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Article
Selective lift-off of GaN light-emitting diode from a sapphire substrate using 266-nm diode-pumped solid-state laser irradiation
Selective laser lift-off of GaN from a sapphire substrate was demonstrated using 266-nm diode-pumped solid-state laser irradiation. To fabricate a single GaN light-emitting diode (LED) with a size of 100 μm × ...
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Article
Removal of nanoparticles on silicon wafer using a self-channeled plasma filament
The effective removal of nanoparticles from a silicon wafer surface was demonstrated using the self-channeled plasma filament excited by a femtosecond (130 fs) Ti:sapphire laser (λ p=790 nm). The ...
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Article
Surface pattern formation on Cr thin film with ultrafast laser pulse
Laser irradiation of a metal surface with multiple pulses just below the ablation threshold generates a periodic surface pattern known as the laser-induced periodic surface structure. The aim of this study is ...