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    Clean waveguides in lithium niobate thin film formed by He ion implantation

    We report on the fabrication of channel waveguides by He ion implantation in a single-crystal LiNbO3 film bonded to a SiO2/LiNbO3 substrate. The planar waveguides were also formed under the same conditions to sho...

    Shao-Mei Zhang, Yun-Peng Jiang, Yang Jiao in Applied Physics B (2017)