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    Investigation of element distribution and homogeneity of TXRF samples using SR-micro-XRF to validate the use of an internal standard and improve external standard quantification

    Total reflection X-ray fluorescence analysis (TXRF) offers a nondestructive qualitative and quantitative analysis of trace elements. Due to its outstanding properties TXRF is widely used in the semiconductor i...

    C. Horntrich, S. Smolek, A. Maderitsch, R. Simon… in Analytical and Bioanalytical Chemistry (2011)