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2 Result(s)

within S. Ronchin Remove this filter Electronics and Microelectronics, Instrumentation Remove this filter

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  1. No Access

    Chapter and Conference Paper

    Pixel Detector Developments for Tracker Upgrades of the High Luminosity LHC

    This paper reports on the INFN (Istituto Nazionale di Fisica Nucleare, Italy) research activity in collaboration with FBK foundry, which is aiming at the development of new pixel detectors for the LHC Phase-2 ...

    M. Meschini, M. Boscardin, G. F. Dalla Betta… in Proceedings of International Conference on… (2018)

  2. No Access

    Article

    Through wafer via holes manufacturing by variable isotropy Deep RIE process for RF applications

    This paper reports a method on the manufacturing of through silicon wafer via holes with tapered walls by Deep Reactive Ion Etching using the opportunity to change the isotropy in the DRIE equipments during pr...

    D. Vasilache, S. Colpo, F. Giacomozzi, S. Ronchin, S. Gennaro… in Microsystem Technologies (2012)