Skip to main content

1 Result(s)

within S. M. Lan Remove this filter

and

  1. No Access

    Article

    Morphology and optical properties of zinc oxide thin films grown on Si (100) by metal-organic chemical vapor deposition

    Undoped zinc oxide (ZnO) thin films were deposited on Si (100) substrates by atmospheric pressure metal-organic chemical vapor deposition (AP-MOCVD). After a nucleation layer of ZnO about 500 Å was deposited, ...

    S. M. Lan, W. Y. Uen, C. E. Chan… in Journal of Materials Science: Materials in… (2009)