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    Article

    A multi-step deposited AlN films in a DC pulsed sputtering and film characteristics classification with principal component analysis of OES data

    In this work, a unique approach in experiments was carried out by a pulsed DC sputtering for the 60/30-min process in one-step and multi-step (two- and four-step) deposition to obtain trends of residual stress...

    Wei-Lun Chen, Wei-Yu Zhou, Ning-Hsiu Yuan… in The International Journal of Advanced Manu… (2023)