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    Damage characteristics of 193 nm laser irradiated on MgF2 window

    MgF2 crystal windows for the weakness part of the optical system have obtained much attention due to the rapid development of photolithography and low-temperature silicon annealing. Investigating the mechanism of...

    ** Wang 王玺, **n Li **欣, Nan-xiang Zhao 赵楠翔 in Journal of Central South University (2023)