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  1. No Access

    Article

    Application of Two-Wavelength X-Ray Optical Scheme for Combined Measurements of X-Ray Specular Reflection and Diffuse Scattering to Study Multilayered Thin Film Structures

    The complex study results of the parameters of TiN/Ti diffusion-barrier structures using the methods of relative X-ray reflectometry and diffuse scattering of X-ray radiation implemented by a two-wavelength X-...

    D. I. Smirnov, N. N. Gerasimenko, V. V. Ovchinnikov in Russian Microelectronics (2017)

  2. No Access

    Article

    Performance of the genetic algorithm in X-ray reflectometry data analysis

    The effect of the width of the search range of solutions on genetic algorithm performance in the interpretation of X-ray reflectograms has been analyzed. The search algorithm has been optimized, based on the r...

    D. A. Kartashov, N. N. Gerasimenko, N. A. Medetov… in Russian Microelectronics (2011)

  3. No Access

    Chapter and Conference Paper

    Quantum Dots in Si-Ge Structures Synthesized by Ge Ion Implantation Into Si Wafers

    Quantum dots (nanosize structures with quantum properties) have been obtained by ion bean synthesis using Ge ion implantation into a silicon wafer. Atomic force and scanning electron microscopies and Auger ele...

    Yu.N. Parkhomenko, N.N. Gerasimenko in Nanostructured Thin Films and Nanodispersi… (2004)