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    Efficient in-depth analysis and optimum design parameter estimation of MEMS capacitive pressure sensor utilizing analytical approach for square diaphragm

    Capacitive pressure sensors have become more popular as compared to piezoresistive pressure sensors as they yield superior sensitivity and lesser nonlinearity. Efficient analysis for modeling capacitive pressu...

    Sumit Kumar **dal, Ishan Patel, Krish Sethi… in Journal of Computational Electronics (2022)