Abstract
Capacitive pressure sensors have become more popular as compared to piezoresistive pressure sensors as they yield superior sensitivity and lesser nonlinearity. Efficient analysis for modeling capacitive pressure sensors is thus increasingly becoming more important due to their innumerable use cases. The higher sensitivity of square diaphragm for the same side length in comparison to circular diaphragm makes it ideal for sensor design. In this work, a complete formulation for analysis of capacitive pressure sensor with the square diaphragm in normal and touch mode operation has been presented as these two modes are established operating modes for these sensors. A comprehensive study of sensor parameters like capacitance, diaphragm deflection, capacitive and mechanical sensitivity has been formulated to aid the choice of sensor characteristics. This work also focuses on the method to determine core design parameters for optimal operation. Computationally complex methods have been used in the past for analysis of square diaphragms. The analytical approach presented in this research is less complex and computationally efficient, in comparison to the finite element method. MATLAB has been used to compute and simulate results.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
Data availibility
Not applicable.
References
**dal, S.K., Mahajan, A., Raghuwanshi, S.K.: A complete analytical model for clamped edge circular diaphragm non-touch and touch mode capacitive pressure sensor. Microsyst. Technol. 22(5), 1143–1150 (2016)
**dal, S.K., Raghuwanshi, S.K.: Capacitance and sensitivity calculation of double touch mode capacitive pressure sensor: theoretical modelling and simulation. Microsyst. Technol. 23(1), 135–142 (2017)
**dal, S.K., Varma, M.A., Thukral, D.: Comprehensive assessment of mems double touch mode capacitive pressure sensor on utilization of sic film as primary sensing element: mathematical modelling and numerical simulation. Microelectron. J. 73, 30–36 (2018)
Varma, M.A., Thukral, D., **dal, S.K.: Investigation of the influence of double-sided diaphragm on performance of capacitance and sensitivity of touch mode capacitive pressure sensor: numerical modeling and simulation forecasting. J. Comput. Electron. 16(3), 987–994 (2017)
Molla-Alipour, M., Ganji, B.A.: Analytical analysis of mems capacitive pressure sensor with circular diaphragm under dynamic load using differential transformation method (dtm). Acta Mech. Solida Sin. 28(4), 400–408 (2015)
Rochus, V., Wang, B., Tilmans, H.A.C., Chaudhuri, A.R., Helin, P., Severi, S., Rottenberg, X.: Fast analytical design of mems capacitive pressure sensors with sealed cavities. Mechatronics 40, 244–250 (2016)
Kang, M.-C., Rim, C.-S., Pak, Y.-T., Kim, W.-M.: A simple analysis to improve linearity of touch mode capacitive pressure sensor by modifying shape of fixed electrode. Sens. Actuators A 263, 300–304 (2017)
**dal, S.K., Raghuwanshi, S.K.: A complete analytical model for circular diaphragm pressure sensor with freely supported edge. Microsyst. Technol. 21(5), 1073–1079 (2015)
Ganji, B.A., Shams, N.M: Modeling of capacitance and sensitivity of a mems pressure sensor with clamped square diaphragm (2013)
**dal, S.K., Mahajan, A., Raghuwanshi, S.K.: Reliable before-fabrication forecasting of normal and touch mode mems capacitive pressure sensor: modeling and simulation. J. Micro Nanolithogr. MEMS MOEMS 16(4), 045001 (2017)
Tai-Ran, H.: Mems and Microsystems: Design and Manufacture. McGrae Hill, New York (2002)
Sharma, A., Mittal, M., Saini, D.: Virtual fabrication, 3d electromechanical simulation and system level modeling of mems capacitive pressure sensor for tire pressure monitoring system. Sens. Transducers 143(8), 106 (2012)
Lee, M.K., Eom, J., Choi, B.: Numerical analysis of touch mode capacitive pressure sensor using graphical user interface. In: Gaol, F.L. (ed.) Recent Progress in Data Engineering and Internet Technology, pp. 371–377. Springer, Berlin (2013)
Bergqvist, J.: Finite-element modelling and characterization of a silicon condenser microphone with a highly perforated backplate. Sens. Actuators A 39(3), 191–200 (1993)
Bao, M.: Analysis and Design Principles of MEMS Devices. Elsevier, Amsterdam (2005)
Timoshenko, S., Woinowsky-Krieger, S., et al.: Theory of Plates and Shells, vol. 2. McGraw-Hill, New York (1959)
Acknowledgements
Not applicable.
Funding
Not applicable.
Author information
Authors and Affiliations
Contributions
All authors contributed to the study conception and design. Material preparation, simulation and analysis were performed by all the authors together. The first draft of the manuscript was written by Mr. Sumit Kumar **dal and all authors commented on previous versions of the manuscript. All authors read and approved the final manuscript
Corresponding author
Ethics declarations
Conflict of interest
Not applicable.
Ethics approval and consent to participate
Not applicable.
Consent for publication
Yes.
Human and animal rights
Not applicable.
Informed consent
Not applicable.
Additional information
Publisher's Note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Rights and permissions
About this article
Cite this article
**dal, S.K., Patel, I., Sethi, K. et al. Efficient in-depth analysis and optimum design parameter estimation of MEMS capacitive pressure sensor utilizing analytical approach for square diaphragm. J Comput Electron 21, 992–1004 (2022). https://doi.org/10.1007/s10825-022-01896-8
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s10825-022-01896-8