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2 Result(s)
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Article
Recurrent feature-incorporated convolutional neural network for virtual metrology of the chemical mechanical planarization process
In semiconductor manufacturing, the chemical mechanical planarization (CMP) process produces higher thickness variability in the edge area of the wafer than that in the center area due to the characteristics o...
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Article
Automatic inspection of salt-and-pepper defects in OLED panels using image processing and control chart techniques
In the manufacture of flat display panels, salt-and-pepper defects are caused by a malfunction in the chemical process. The defects are characterized by the dispersion of many black and white pixels in the dis...
