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Article
A variational autoencoder for a semiconductor fault detection model robust to process drift due to incomplete maintenance
In the semiconductor manufacturing field, few studies on fault detection (FD) models have considered process drift due to incomplete maintenance. Process drift refers to the shift in sensor measurements over t...
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Article
A run-to-run controller for a chemical mechanical planarization process using least squares generative adversarial networks
Achieving high processing quality for chemical mechanical planarization (CMP) in semiconductor manufacturing is difficult due to the distinct process variations associated with this method, such as drift and s...
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Article
Discriminative feature learning and cluster-based defect label reconstruction for reducing uncertainty in wafer bin map labels
Many studies have been conducted to improve wafer bin map (WBM) defect classification performance because accurate WBM classification can provide information about abnormal processes causing a decrease in yiel...
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Article
Recurrent feature-incorporated convolutional neural network for virtual metrology of the chemical mechanical planarization process
In semiconductor manufacturing, the chemical mechanical planarization (CMP) process produces higher thickness variability in the edge area of the wafer than that in the center area due to the characteristics o...
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Article
Automatic inspection of salt-and-pepper defects in OLED panels using image processing and control chart techniques
In the manufacture of flat display panels, salt-and-pepper defects are caused by a malfunction in the chemical process. The defects are characterized by the dispersion of many black and white pixels in the dis...
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Article
Coherence analysis of research and education using topic modeling
Research and education are organically connected in that lectures convey the results of research, which is frequently initiated by inspiring lectures. As a result, the contents of lecture materials and researc...
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Article
A data mining approach to the causal analysis of product faults in multi-stage PCB manufacturing
It is difficult for manufacturers of printed circuit boards (PCBs) to remain competitive because of the ever-increasing complexity of circuit board designs and processes that increase the product cost while de...
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Article
Wafer-to-wafer process fault detection using data stream mining techniques
In this paper, we develop a wafer-to-wafer fault detection system using data stream mining techniques for a semiconductor etch tool. The system consists of two data stream mining modules: a trace segmentation ...
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Article
Due-date scheduling on parallel machines with job splitting and sequence-dependent major/minor setup times
This paper addresses job scheduling problems with parallel machines. To satisfy customers better in a manufacturing company, meeting due dates has been an important performance metric. Besides the numerous oth...
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Article
Asynchronous action-reward learning for nonstationary serial supply chain inventory control
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Article
Asynchronous action-reward learning for nonstationary serial supply chain inventory control
Action-reward learning is a reinforcement learning method. In this machine learning approach, an agent interacts with non-deterministic control domain. The agent selects actions at decision epochs and the cont...
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Chapter and Conference Paper
An Adaptive Inventory Control Model for a Supply Chain with Nonstationary Customer Demands
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Chapter and Conference Paper
An Adaptive Inventory Control Model for a Supply Chain with Nonstationary Customer Demands
In this paper, we propose an adaptive inventory control model for a supply chain consisting of one supplier and multiple retailers with nonstationary customer demands. The objective of the adaptive inventory c...
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Chapter and Conference Paper
Meta-model Driven Collaborative Object Analysis Process for Production Planning and Scheduling Domain
This paper presents a new object-oriented analysis process for creating reusable software components in production planning and scheduling domain. Our process called MeCOMA (Meta-Model Driven Collaborative Obj...
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Article
A machine cell formation algorithm for simultaneously minimising machine workload imbalances and inter-cell part movements
This paper considers a multi-objective machine cell problem, in which part types have several alternative part routings and the expected annual demand of each part type is known. This problem is characterised ...
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Chapter and Conference Paper
Optimal Signal Control Using Adaptive Dynamic Programming
This paper develops an adaptive, optimal planning algorithm for signal control at a single intersection using an efficient dynamic programming technique. It is called ADPAS (Adaptive Dynamic Programming Algori...
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Chapter and Conference Paper
Ontology Based Negotiation Case Search System for the Resolution of Exceptions in Collaborative Production Planning
In this paper, we present an ontology based negotiation case search system that supports contractors to solve exceptions generated during the operation of supply chain.
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Article
Scheduling jobs on parallel machines: a restricted tabu search approach
Many real scheduling problems are often much more complex than problems that are analytically tractable. The main difficulty in obtaining optimal job schedules arises from the existence of sequence dependent s...
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Article
Guest editorial
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Article
Contract-collaboration network method for modeling manufacturing resource control workflows
This paper presents contract-collaboration network (CC-Net) method that is developed to model manufacturing resource control workflows. The CC-Net is an object-oriented class diagram. It depicts the contract-c...
