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  1. No Access

    Article

    Leakage Current Behaviors of Ba0.5Sr0.5TiO3 Thin Films on Pt, RuO2, and Pt/RuO2 Bottom Electrodes

    Ba0.5Sr0.5TiO3 thin films were grown by rf-magnetron sputtering. Pt and RuO2 films were used as bottom electrodes of the Ba0.5Sr0.5TiO3 thin films. Further, a Pt/RuO2 hybrid electrode was adopted as an electrode ...

    W. Jo, D. C. Kim, H. M. Lee, K. Y. Kim in MRS Online Proceedings Library (1996)

  2. No Access

    Article

    Preparation and Microstructural Characterization of Ferroelectric Thin Film PbTiO3 on Si, MgO, and Sapphire Deposited by DC Reactive Multitarget Co-Sputtering.

    PbTiO3 thin films on Si (100) plane were prepared by the DC reactive multitarget cosputtering technique. The film composition and structure were examined as a function of deposition parameters. The crystal struct...

    K.Y. Kim, H.I. Hwang, J.Y. Lee, W.K. Choo in MRS Online Proceedings Library (1991)