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    Open Access

    Automatic beam optimization method for scanning electron microscopy based on electron beam Kernel estimation

    Scanning Electron Microscopy (SEM) leverages electron wavelengths for nanoscale imaging, necessitating precise parameter adjustments like focus, stigmator, and aperture alignment. However, traditional methods ...

    Yunje Cho, Junghee Cho, Jonghyeok Park, Jeonghyun Wang… in Communications Engineering (2024)

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