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Article
Analysis of parasitic feed-through capacitance effect in closed-loop drive circuit design for capacitive micro-gyroscope
The drive axis of a capacitive micro-gyroscope sensor forms an ‘electrical-mechanical’ resonator with closed-loop drive circuits when the gyro is in full operation. The parasitic feed-through capacitance, whic...
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Article
Design and fabrication of a micromachined gyroscope with high shock resistance
In this paper, a tuning fork gyroscope designed for high-g shock environments is presented. This micro gyroscope with 10 kHz designed working frequency is composed of double symmetrical frame structures that a...