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    Analysis of parasitic feed-through capacitance effect in closed-loop drive circuit design for capacitive micro-gyroscope

    The drive axis of a capacitive micro-gyroscope sensor forms an ‘electrical-mechanical’ resonator with closed-loop drive circuits when the gyro is in full operation. The parasitic feed-through capacitance, whic...

    Huan-ming Wu, Tao Yin, Ji-wei Jiao, Hai-gang Yang in Microsystem Technologies (2016)