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Article
Analysis of parasitic feed-through capacitance effect in closed-loop drive circuit design for capacitive micro-gyroscope
The drive axis of a capacitive micro-gyroscope sensor forms an ‘electrical-mechanical’ resonator with closed-loop drive circuits when the gyro is in full operation. The parasitic feed-through capacitance, whic...
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Article
Open AccessSingle nucleotide polymorphism rs13042395 in the SLC52A3 gene as a biomarker for regional lymph node metastasis and relapse-free survival of esophageal squamous cell carcinoma patients
SLC52A3 was recently identified as a susceptibility gene for esophageal squamous cell carcinoma (ESCC). However, associations between the single nucleotide polymorphisms (SNPs) rs13042...
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Article
Design and fabrication of a micromachined gyroscope with high shock resistance
In this paper, a tuning fork gyroscope designed for high-g shock environments is presented. This micro gyroscope with 10 kHz designed working frequency is composed of double symmetrical frame structures that a...
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Article
Fabrication and characterization of NEMS
We proposed a called “nano-fabrication based on MEMS technology” approach to realize the typical nano-electromechanical structures, such as integrated nano probe, ultrathin cantilever, silicon nano wire, and d...