Skip to main content

1 Result(s)

within Jamie K. Schaeffer Remove this filter

and

  1. No Access

    Chapter

    Metal Gate Electrodes

    Metal gate electrodes are a vital enabler for the use of high-k gate dielectrics in advanced complimentary metal oxide semiconductor (CMOS) technology. This chapter will detail how metal gate electrodes were s...

    Jamie K. Schaeffer in High Permittivity Gate Dielectric Materials (2013)