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    Spectroscopic investigation of the discharge for PA-CVD of TiN

    Investigations of the discharge for PA-CVD of TiN on steel substrates are carried out using optical emission spectroscopy. A great number of species could be identified in the discharge. The growth rate of den...

    K. -T. Rie, A. Gebauer, J. Wöhle in Plasma Chemistry and Plasma Processing (1993)