Skip to main content

1 Result(s)

within J. Randall Phillips Remove this filter

and

  1. No Access

    Article

    Degradation of Micron-Sized Silicide Lines on Polycrystalline Silicon

    The thermal stability of silicide fine lines on undoped CVD polycrystalline silicon was investigated. Heat treatments were in vacuum at temperatures up to 950°C. We observed that fine silicide lines on undoped...

    J. Randall Phillips, Lung-Ru Zheng, James W. Mayer in MRS Online Proceedings Library (1987)