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    Numerical study of the DLC film flow field in the ECR-PECVD reaction chamber

    This paper mainly investigates the optimum parameters for the fabrication of uniform diamond-like carbon (DLC) films on the electron cyclotron resonance plasma enhanced chemical vapor deposition (ECR-PECVD) re...

    F. -L. Lih, C. -H. Tai, J. -C. Leong in Journal of Applied Mechanics and Technical Physics (2014)