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    Chapter

    Precision Manufacturing Process Monitoring with Acoustic Emission

    Demands in high-technology industries such as semiconductor, optics, MEMS, etc., have predicated the need for manufacturing processes that can fabricate increasingly smaller features reliably at very high tole...

    D. E. Lee, Inkil Hwang, C. M. O. Valente… in Condition Monitoring and Control for Intel… (2006)