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  1. Article

    Open Access

    Optical characteristics of highly conductive n-type GaN prepared by pulsed sputtering deposition

    We have characterized highly conductive Si-doped GaN films with a high electron mobility of 112 cm2V−1s−1 at an electron concentration of 2.9 × 1020 cm−3, prepared using pulsed sputtering deposition (PSD). With a...

    Kohei Ueno, Fudetani Taiga, Atsushi Kobayashi, Hiroshi Fujioka in Scientific Reports (2019)

  2. Article

    Open Access

    AlN/InAlN thin-film transistors fabricated on glass substrates at room temperature

    In this study, InAlN was grown on glass substrates using pulsed sputtering deposition (PSD) at room temperature (RT) and was applied to thin-film transistors (TFTs). The surface flatness of the InAIN films was...

    Kyohei Nakamura, Atsushi Kobayashi, Kohei Ueno, Jitsuo Ohta in Scientific Reports (2019)

  3. Article

    Open Access

    Pulsed sputtering epitaxial growth of m-plane InGaN lattice-matched to ZnO

    m-Plane GaN and InGaN films were grown on m-plane ZnO substrates at ~350 °C by pulsed sputtering deposition. It was found that the critical thickness of the m-plane GaN films grown on ZnO...

    Atsushi Kobayashi, Jitsuo Ohta, Hiroshi Fujioka in Scientific Reports (2017)

  4. Article

    Open Access

    Fabrication of full-color GaN-based light-emitting diodes on nearly lattice-matched flexible metal foils

    GaN-based light-emitting diodes (LEDs) have been widely accepted as highly efficient solid-state light sources capable of replacing conventional incandescent and fluorescent lamps. However, their applications ...

    Hyeryun Kim, Jitsuo Ohta, Kohei Ueno, Atsushi Kobayashi, Mari Morita in Scientific Reports (2017)

  5. Article

    Open Access

    Fabrication of InGaN thin-film transistors using pulsed sputtering deposition

    We report the first demonstration of operational InGaN-based thin-film transistors (TFTs) on glass substrates. The key to our success was coating the glass substrate with a thin amorphous layer of HfO2, which ena...

    Takeki Itoh, Atsushi Kobayashi, Kohei Ueno, Jitsuo Ohta in Scientific Reports (2016)

  6. Article

    Open Access

    Fabrication of full-color InGaN-based light-emitting diodes on amorphous substrates by pulsed sputtering

    InGaN-based light-emitting diodes (LEDs) have been widely accepted as highly efficient light sources capable of replacing incandescent bulbs. However, applications of InGaN LEDs are limited to small devices be...

    Jeong Woo Shon, Jitsuo Ohta, Kohei Ueno, Atsushi Kobayashi in Scientific Reports (2014)

  7. Article

    Open Access

    Field-effect transistors based on cubic indium nitride

    Although the demand for high-speed telecommunications has increased in recent years, the performance of transistors fabricated with traditional semiconductors such as silicon, gallium arsenide and gallium nitr...

    Masaaki Oseki, Kana Okubo, Atsushi Kobayashi, Jitsuo Ohta in Scientific Reports (2014)