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    Chapter and Conference Paper

    Investigation of the Local Ge Concentration in Si/SiGe Multi-QW Structures by CBED Analysis and FEM Calculations

    The local Ge concentration in Si/SiGe multiquantum well structures was investigated by CBED analysis. Series of bright field CBED patterns were taken across the quantum wells using the [340]-zone axis in STEM ...

    E Ruh, G Mussler, E Müller, D Grützmacher in Microscopy of Semiconducting Materials 2007 (2008)