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    Reprocessing of thermally oxidized aluminum arsenide (AlAs) in epitaxial multilayers without delamination

    Annealing or processing of AlAs that has been subjected to a wet thermal oxidation process can result in severe delamination of material at the oxidation front. This paper reports a procedure for preventing th...

    L. Hobbs, I. Eddie, G. Erwin, A. C. Bryce… in Journal of Electronic Materials (2005)