1 Result(s)

Chapter and Conference Paper

Linear Inertial Motor with Double Piezo Actuator for Improving Motion Deviations Between Positive and Negative Directions

Due to their high-resolution, non-electromagnetic nature, power-off self-locking feature, simple structure, and easy control, linear inertial motors have garnered significant attention in the optics industry. ...

Zhu **ngxing, Fan Junyu, ** Long, Xu Zhike… in Proceedings of the 4th International Confe… (2024)