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    Laser-Induced Photodissociation of A12(CH3)6: Gas-Phase and Adsorbed Layer Dissociation Mechanisms for A1 Film Growth

    In recent years, photolytic laser-induced chemical vapor deposition (LCVD) has become an important addition to the available thin-film growth techniques.[1] The motivation for LCVD is twofold. By focusing and ...

    D. Lubben, T. Motooka, J. F. Wendelken… in Mechanisms of Reactions of Organometallic … (1989)