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XANES and XPS characterization of hard amorphous CSixNy thin films grown by RF nitrogen plasma assisted pulsed laser deposition
Amorphous carbon silicon nitride thin films were grown on (100) oriented silicon substrates by pulsed laser deposition (PLD) assisted by an RF nitrogen plasma source. Up to about 30 at. % nitrogen and up to 2...
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Article
Calculation of electrostatic interaction forces between ellipsoidal particles
An analytical expression is presented for describing the electrostatic interaction forces between various shaped particles having mutual orientations. The expression is derived by applying the surface integrat...