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    Nucleation and Growth of CVD Cu Films

    In this work the nucleation and growth of CVD Cu on MOCVD TiN barrier layer as well as on PVD Ta with and without a PVD Cu seed layer on top were studied. Scanning and transmission electron microscopy was used...

    R. Kröger, M. Eizenberg, D. Cong, N. Yoshida, L. Y. Chen… in MRS Online Proceedings Library (1999)