7 Result(s)
within
Chang Ouk Kim
Business and Management
Control, Robotics, Mechatronics
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Article
A variational autoencoder for a semiconductor fault detection model robust to process drift due to incomplete maintenance
In the semiconductor manufacturing field, few studies on fault detection (FD) models have considered process drift due to incomplete maintenance. Process drift refers to the shift in sensor measurements over t...
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Article
A run-to-run controller for a chemical mechanical planarization process using least squares generative adversarial networks
Achieving high processing quality for chemical mechanical planarization (CMP) in semiconductor manufacturing is difficult due to the distinct process variations associated with this method, such as drift and s...
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Article
Discriminative feature learning and cluster-based defect label reconstruction for reducing uncertainty in wafer bin map labels
Many studies have been conducted to improve wafer bin map (WBM) defect classification performance because accurate WBM classification can provide information about abnormal processes causing a decrease in yiel...
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Article
Recurrent feature-incorporated convolutional neural network for virtual metrology of the chemical mechanical planarization process
In semiconductor manufacturing, the chemical mechanical planarization (CMP) process produces higher thickness variability in the edge area of the wafer than that in the center area due to the characteristics o...
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Article
Automatic inspection of salt-and-pepper defects in OLED panels using image processing and control chart techniques
In the manufacture of flat display panels, salt-and-pepper defects are caused by a malfunction in the chemical process. The defects are characterized by the dispersion of many black and white pixels in the dis...
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Article
Guest editorial
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Article
Contract-collaboration network method for modeling manufacturing resource control workflows
This paper presents contract-collaboration network (CC-Net) method that is developed to model manufacturing resource control workflows. The CC-Net is an object-oriented class diagram. It depicts the contract-c...
