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    Chapter and Conference Paper

    Wafer Handling Demo by SERPC

    The wafer handling is a complex operation that requires wafer positioning, accuracy and repeatability needed for reliable results. Every action taken with a wafer must be exactly what the operator wants, no mo...

    N. Abbate, A. Basile, S. Ciardo, A. Faulisi, C. Guastella… in Climbing and Walking Robots (2006)