102 Result(s)
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Article
Chemical Wear of Cu CMP
In this work, we used surface analysis techniques, such as a field-emission highresolution analytical TEM, X-ray spectroscopy, and XPS to analyze abrasive particles after polishing. Results showed evidence of ...
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Article
Influence of oxides on friction during Cu CMP
In this work, we investigated the frictional behavior of copper CMP. Using a laboratory polishing set up, we polished Cu with designed polishing media. After that the copper surface and the fumed silica partic...
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Article
Effects of electric potential on chemical-mechanical polishing of copper
The effect of electric potential on the dissolution and polishing behavior of copper in acidic and alkaline media was investigated. The electromechanical polishing mechanism of copper is discussed based on rem...
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Article
Interfacial transfer between copper and polyurethane in chemical-mechanical polishing
The interactions between a copper and urethane polishing pads were characterized to investigate the effects of friction on removal mechanisms of a polishing system of copper interconnect wafers in water. In-si...
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Article
Low-Temperature Friction in the XPS Analytical Ultrahigh Vacuum Tribotester
In this work, we present the capability of ultrahigh vacuum analytical tribometry for studying mechanisms of friction at low temperatures. We investigated the low-temperature frictional behavior of two differe...
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Article
Quantum chemical study of adsorption and dissociation of HfCl4 and H2O on Ge/Si(100) − (2×1): Initial stage of atomic layer deposition of HfO2 on SiGe surface
We investigated adsorption and dissociation of water and HfCl4 on a Ge/Si(100) − (2 × 1) surface with a density-functional theory. The Si–Ge and Ge–Ge homodimers are used to represent the Si1−xGex surface. (i) Wa...
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Article
Processing and Properties of Nanostructured Alloy Coatings in the Binary Ni-Cr System
Using a scalable electrodeposition process, nanocrystalline Ni-Cr alloy coatings have been produced on copper and steel substrates, and the roles of various processing variables on the resulting coating struct...
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X-ray reflectometry and spectroscopic ellipsometry characterization of Al2O3 atomic layer deposition on HF-last and NH3 plasma pretreatment Si substrates
Al2O3 films are grown by atomic layer deposition (ALD) using trimethylaluminum and water as precursors on HF-last and NH3 plasma pretreatment Si substrates. The thickness, surface roughness, and density of Al2O3 ...
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Article
Effect of microstructures of PVDF on surface adhesive forces
This research studies the effects of microstructures of poly vinylidene fluoride (PVDF) on its adhesion force with the probe of an atomic force microscope (AFM). The adhesion problem is currently a bottleneck ...
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Article
Biomimetic study of a polymeric composite material for joint repair applications
A longer lifespan is still being sought for biomaterials used for joint repair. We developed a new nanocomposite material of polytrimethylene carbonate (PTMC), hydroxyapatite (HAP), and multiwalled carbon nano...
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Article
Controlled synthesis of titanium nanochains using a template
Nanochains have unique properties due to their organized structures. We synthesized nanochains of titanium using crown ether as a template exploiting a simple sliding technique. The nanochains of Ti were forme...
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Preparation and characterization of polymer-supported nano-amorphous Ni–B particles
Polymer-supported nano-amorphous Ni–B particles have been prepared by an ion exchange/chemical reduction protocol. The products were characterized by inductively coupled plasma spectroscopy (ICP), X-ray powder...
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Chapter
Scanning Probe Alloying Nanolithography
The probe-based nanolithography method is attracting increasing attentions due to its unique and simple process characteristics. This chapter, first, provides a brief review of nanolithography in order to see ...
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Article
Ore-proportioning optimization technique with high proportion of Yandi ore in sintering
The basic sintering characteristics of Yandi ore from Australia, including assimilation ability, liquid phase fluidity, self-strength of bonding phase, forming ability of silico ferrite of calcium and aluminum...
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Article
Critical fluid shear stress analysis for cell–polymer adhesion
A simple methodology to assess cell adhesion on materials was developed. We demonstrated that the cell adhesion strength could be quantified. Using this method, we were able to compare the NIH/3T3 Swiss mouse ...
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Article
Photochemical synthesis of shape-selective palladium nanocubes in aqueous solution
We have developed a seedless, citrateless one-step synthetic process for the formation of shape controlled monodisperse Pd nanoparticles (NPs) in 4 h of UV-photoirradiation. The synthesis was done in cetyl tri...
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Article
Polymer-directed assembly of water-soluble realgar nanocomposites for antimicrobial applications
The poor water-solubility of realgar unfortunately results in poor bioavailability and hampers its medicinal application. In this work, water-soluble realgar nanoparticles (As4S4 NPs) were synthesized in aqueous ...
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Article
Interactions between neural stem cells and biomaterials combined with biomolecules
Neural repair and regeneration have been a tough problem in clinical studies. Tissue engineering using biomaterials along with neural stem cells (NSCs) have shown great potential for treatment, especially alon...
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Article
Phase transformation of poly (vinylidene difluoride) in energy harvesting
The poly (vinylidene difluoride) (PVDF) has been of great interest for energy conversion of microelectromechanical system devices. A semicrystalline polymer, the PVDF has five crystallo-graphic forms, α, β, γ,...
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Article
Study on the doped β-FeSi2 obtained by metal vapor vacuum arc ion source implantation and post-annealing
β-FeSi2 was firstly formed by implanting Si wafers with Fe ions at 50 kV to a dose of 5×1017/cm2in a strong current Metal Vapor Vacuum Arc (MEVVA) implanter. Secondly, Ti implantation was performed on these Fe as...
