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RBS Lattice Site Location and Damage Recovery Studies in GaN
Erbium was implanted with 160 keV at doses between 5×1014 and 5×1015 at/cm2 into (0001) epitaxial GaN on sapphire and annealed at various temperatures between 600° and 1000° C. The RBS/Channeling technique was us...
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Article
RBS Lattice Site Location and Damage Recovery Studies In GaN
Erbium was implanted with 160 keV at doses between 5×1014 and 5×1015 at/cm2 into (0001) epitaxial GaN on sapphire and annealed at various temperatures between 6000° and 10000° C. The RBS/Channeling technique was ...