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Structural Inhomogeneity of SrBi2Ta2O9Thin Films Prepared by Layer-by-Layer Technique

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Abstract

Grazing incidencex-ray diffraction has been employed to perform the depth-profile analysis on SrBi2Ta2O9 (SBT) thin films with different preferential orientations. For the polycrystalline SBT thin film, the change in structural orientation occurs only within the 15-nm-thick top layer, which is associated with the formation of the (200)-predominant SBT thin film prepared by the layer-by-layer annealing process. The inhomogeneity of structural orientation is more significant in the full film thickness for the (200)- predominant SBT thin film. (0010) peak can only be observed for the grazing angle larger than 0.6°. A layer with the highest ratio of I(200)/I(115) is found in the top surface layer (i.e., the latest layer during deposition) of the (200)-predominant SBT thin film.

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Authors and Affiliations

  1. Department of Electronic Engineering and Material Science and Technology Research Center, The Chinese University of Hong Kong, Hong Kong SAR, China

    J. B. Xu, G. D. Hu & S. P. Wong

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  1. J. B. Xu
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  2. G. D. Hu
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  3. S. P. Wong
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Correspondence to J. B. Xu.

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Xu, J.B., Hu, G.D. & Wong, S.P. Structural Inhomogeneity of SrBi2Ta2O9Thin Films Prepared by Layer-by-Layer Technique. MRS Online Proceedings Library 688, 471 (2001). https://doi.org/10.1557/PROC-688-C4.7.1

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  • DOI: https://doi.org/10.1557/PROC-688-C4.7.1

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